| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique for obtaining an optical reflection mirror constituted by forming a reflection film on the surface of a base plate composed of an SiC-Si composite material with which the reflection film free from cracks is easily formed and which has ultra-precision surface roughness and flatness. <P>SOLUTION: The optical reflection mirror is constituted by forming the reflection mirror directly on the surface of the base plate composed of the SiC-Si composite material obtained by compositing SiC reinforcing material in an Si matrix, and the content of SiC in the SiC-Si composite material is 60 to 90 volume %, and the surface roughness Ra of the base plate is ≤10nm. Furthermore, it is desirable to set the mean value of Si matrix phase width in the tissue of the SiC-Si composite material to ≤1μm, and the mean particle size of the SiC reinforcing material to ≤3μm. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
