摘要 |
PURPOSE:To provide an ultrasonic motor, in which the resonance frequency of two oscillations to be used for driving can be made equal without especially providing a resonator with an external load. CONSTITUTION:In an ultrasonic motor constituted by an electromechanical energy conversion element such as piezoelectric element 3 and metallic materials having a resonator 1 for composing two oscillations or more and generating a circular oscillation and a movable body to be brought into pressure contact with the circular oscillation part of the resonator 1 and taken out as output, the variation of elastic modulus in the direction of oscillation corresponding to each of the two oscillations or more formed in the resonator 1 is within 0.6%. |