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发明名称
EVALUATION OF POLYCRYSTALLINE MATERIAL
摘要
申请公布号
JPH08330373(A)
申请公布日期
1996.12.13
申请号
JP19950156657
申请日期
1995.06.01
申请人
NEC CORP
发明人
WATABE KOJI
分类号
G01N21/00;G01B11/00;G01N21/21;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01N21/00
代理机构
代理人
主权项
地址
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