FORMATION OF SOG FILM OF SEMICONDUCTOR ELEMENT,申请号JP19960124131-传众专利搜索

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发明名称	FORMATION OF SOG FILM OF SEMICONDUCTOR ELEMENT
摘要
申请公布号	JPH08330301(A)	申请公布日期	1996.12.13
申请号	JP19960124131	申请日期	1996.05.20
申请人	GENDAI DENSHI SANGYO KK	发明人	SHIN TOZEN;KIN MINSAI
分类号	H01L21/302;H01L21/31;H01L21/3105;H01L21/316;(IPC1-7):H01L21/316;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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