发明名称 Method and apparatus for monitoring parts in a material processing system
摘要 The present invention presents an improved apparatus and method for monitoring parts in a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive part identifiers coupled to the processing tool to generate and transmit part ID data, and a sensor interface assembly (SIA) configured to receive the part ID data from the plurality of RF-responsive part identifiers.
申请公布号 US6985787(B2) 申请公布日期 2006.01.10
申请号 US20020331340 申请日期 2002.12.31
申请人 TOKYO ELECTRON LIMITED 发明人 KLEKOTKA JAMES E.
分类号 G06F19/00;G05B19/418;H01J37/32 主分类号 G06F19/00
代理机构 代理人
主权项
地址