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发明名称
Kontaktsonden-Anordnung zum elektrischen Verbinden einer Prüfeinrichtung mit den kreisförmigen Anschlußflächen eines Prüflings
摘要
申请公布号
DE19538792(C2)
申请公布日期
2000.08.03
申请号
DE19951038792
申请日期
1995.10.18
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
BAYER, THOMAS;GRESCHNER, JOHANN;MEISSNER, KLAUS;STEINER, WERNER;STOEHR, ROLAND
分类号
G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R31/28;H01R11/18
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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