METHOD FOR LASER BEAM MACHINING AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method for laser beam machining and device therefor capable of forming high powered laser beam a having a uniform energy density in a plane perpendicular to the optical axis without using optical parts complicated in adjustment and then projecting laser beams on a work. SOLUTION: A device to project laser beams 11 on the surface of a work 15 to machine the surface of the work 15 is equipped with a microlens array 18 on which laser beam 11 falls and a beam synthesizing lens 20 for nearly uniformizing the energy density of the laser beams passed through the microlens array 18 at a prescribed spacial position 21 and on a vertical plane at the prescribed spacial position relative to the optical axis and in a prescribed shape.