ELECTRON SOURCE WITH FIELD EFFECT EMITTERS

摘要

The invention relates to an electron source intended for use in field emission electronic devices. The source contains a plurality of controllable field emission cells, formed on a substrate (1) having sequentially applied thereto an insulating layer (2) and a conducting layer (3), said layers having a plurality of openings (4, 5). A field effect emitter (7) is positioned on the substrate, within each such opening. Each cell is formed by: an emitter (7), which, together with the portion of the substrate that it occupies, constitutes a cathode of the cell; and by a control electrode, consisting of a portion of the conducting layer which abuts an opening in the conducting layer (3). The present source is characterized in that an annular recess (9) is provided in the substrate (1) surrounding the emitter (7). The surface of this recess is covered by an insulating material (10.1, 12.1) or is oxidized. The achieved technical result consists in providing higher electric strength in gaps between the control electrode and the emitter by means of increasing the length of the path of possible breakdown, thus increasing the electric strength of the surface of the structural elements which separate said electrodes.