Non-contact transfer hand

摘要

A non-contact transfer hand includes a suction holding plate and a lid portion. The suction holding plate has a flat-shaped suction surface as a front surface, a non-suction surface as a back surface, and a chamber. The suction surface has a gas discharge groove. The non-suction surface has a gas supply groove that has a gas introduction port. The chamber communicates with an end of the gas supply groove. A wall surface of the chamber has an inlet. The gas supply groove is configured to supply gas from the gas introduction port toward the chamber. The gas discharge groove communicates with the chamber via the inlet, and is configured to discharge the gas in a direction apart from the chamber. The lid portion is fixed on the non-suction surface to cover the gas supply groove and the chamber.

主权项

1. A non-contact transfer hand comprising:
a suction holding plate that is a single plate having a flat-shaped suction surface, a non-suction surface, and a chamber, the suction surface and the non-suction surface being opposite sides of the single plate; and a lid portion, wherein the suction surface has a gas discharge groove, the non-suction surface has a gas supply groove that has a gas introduction port, the chamber communicates with an end of the gas supply groove, the gas supply groove is configured to supply gas front the gas introduction port toward the chamber, a wall surface of the chamber has an inlet of the gas discharge groove, the gas discharge groove communicates with the chamber via the inlet, and is configured to discharge the gas in a direction apart from the chamber, and the lid portion is fixed on the non-suction surface to cover the gas supply groove and the chamber.