Coating equipment for a composite membrane without a diffusion pump and its thickness gauge for both thick and thin coatings

摘要

A coating equipment for composite membrane without diffusion pump and its thickness gauge for both thick and thin coatings comprises a coating equipment for composite membrane without diffusion pump and a thickness gauge for both thick and thin coatings. A vacuum pump system of the coating equipment for composite membrane without diffusion pump is a roots-type pump system. Compared to conventional diffusion pumps, roots-type pump have advantages of low energy consumption, stable performance, good vacuum-pumping effect, short starting time, etc.

主权项

1. Coating equipment for a composite membrane without a diffusion pump, comprising: a vacuum-pumping system and a coating chamber, wherein said vacuum-pumping system is connected with said coating chamber for vacuumizing said coating chamber, said vacuum-pumping system comprises a vacuum pump system provided therein, and said vacuum pump system is a roots-type pump system;
wherein an evaporation box system having an adjustable height is provided in said coating chamber, an evaporation box used as an evaporation source is provided in said evaporation box system, said evaporation box is provided on an evaporation box holder, and said evaporation box is connected with said evaporation box holder via a lifting mechanism; wherein said lifting mechanism is an electric lifting mechanism, said electric lifting mechanism comprises a lifting arm connected to said evaporation box, wherein said lifting arm is connected to and driven by a servo motor, while a controlling terminal of said servo motor is connected to and controlled by a computer; wherein at least two evaporators are arranged on said evaporation box, said evaporation box has a cuboid chamber provided in an upper portion thereof, said evaporators have rectangular openings, and said evaporators are arranged in said cuboid chamber of said evaporation box in parallel.