FOCUSED ION BEAM APPARATUS

摘要

The present invention relates to a focused ion beam apparatus for stably and continuously emitting ions emitted from a gas electric field ionization ion source with higher brightness along an optical axis of an ion optical system for a long time so as to form focused ion beam for a long time. An emitter forms sharped iridium and heterogeneous metal fine wire in a fixed shape with regard to the focused ion beam apparatus equipped with gas electric field ionization ion source having the emitter to emit the ions.