发明名称 Method and apparatus for high speed acquisition of moving images using pulsed illumination
摘要 A method of operating an image sensor with a continuously moving object is described. In this method, a timed delay integration mode (TDI-mode) operation can be performed during an extended-time illumination pulse. During this TDI-mode operation, charges stored by pixels of the image sensor are shifted only in a first direction, and track the image motion. Notably, a split-readout operation is performed only during non-illumination. During this split-readout operation, first charges stored by first pixels of the image sensor are shifted in the first direction and second charges stored by second pixels of the image sensor are concurrently shifted in a second direction, the second direction being opposite to the first direction.
申请公布号 US9426400(B2) 申请公布日期 2016.08.23
申请号 US201314096911 申请日期 2013.12.04
申请人 KLA-Tencor Corporation 发明人 Brown David L.;Chuang Yung-Ho;Yuditsky Yury
分类号 H04N5/374;H04N5/225;G01N21/956 主分类号 H04N5/374
代理机构 Bever, Hoffman & Harms, LLP 代理人 Bever, Hoffman & Harms, LLP
主权项 1. A method of operating an image sensor to generate an image of a continuously moving object, the image sensor including a plurality of pixels aligned along a read-out axis, wherein the continuously moving object moves along an axis of movement that is parallel to the read-out axis, the method comprising: performing a timed delay integration mode (TDI-mode) operation during an illumination pulse, wherein a plurality of charges are respectively stored by said plurality of pixels of the image sensor, each said charge forming an image region generated by said pulsed illumination reflected from a corresponding fixed point on the continuously moving object, and the plurality of charges are shifted from pixel to pixel only in a first direction along the read-out axis during said TDI-mode operation such that each said charge is shifted along with said corresponding fixed point in a manner that prevents blurring; and performing a split-readout operation during a non-illumination period following the TDI-mode operation, wherein first said charges stored by first said pixels of the image sensor are shifted from pixel to pixel in the first direction along the read-out axis while second said charges stored by second said pixels of the image sensor are concurrently shifted from pixel to pixel in a second direction along the read-out axis during the split-readout operation, the second direction being opposite to the first direction.
地址 Milpitas CA US