Micromachined piezoelectric x-axis gyroscope

摘要

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.

主权项

1. A method of fabricating a gyroscope, comprising:
depositing conductive material on a substrate; forming a sense frame; forming a proof mass disposed outside the sense frame; forming a pair of anchors; forming a plurality of drive beams disposed on opposing sides of the sense frame and between the pair of anchors, the drive beams connecting the sense frame to the proof mass, each of the drive beams including a piezoelectric layer and capable of causing drive motions of the proof mass, the drive motions being torsional oscillations substantially in a plane of the drive beams; and forming a plurality of sense beams including a layer of piezoelectric sense electrodes, the sense beams capable of connecting the sense frame to the pair of anchors, wherein forming the plurality of drive beams includes the following:
depositing a first metal layer that is in contact with the conductive material;depositing a piezoelectric layer on the first metal layer;depositing a second metal layer on the piezoelectric layer; andforming a third metal layer on the second metal layer.