| 摘要 |
PROBLEM TO BE SOLVED: To enhance the insulating capability of a ceramic far infrared radiation heater by forming an insulating film having almost the same composition as the heater on the surface of the ceramic far infrared radiation heater. SOLUTION: A ceramic far infrared radiation heater contains aluminum silicate as a main component and a silicon compound as a conductive material. A 1-50μm thick insulating film containing A12 O3 as a main component is formed on the surface of the heater. Since the insulating layer and the conductive layer of the far infrared radiation heater have the almost the same composition, the coefficient of thermal expansion of both layers is almost equal, the separation of two layers during use is prevented, and the heater can stably be used to the temperature of about 600 deg.C. |
