| 摘要 |
PROBLEM TO BE SOLVED: To mount an element with high accuracy by supporting a heater block, on the facing side thereof, with a resilient body having the same spring constant, making the heater block and a support frame of a thin plate and covering the frame with a heat insulation material thereby eliminating the effect of positional shift due to thermal expansion. SOLUTION: A planar heater block 10 is surrounded by a heater block support frame 30 and connected therewith through resilient structures 20a-20c. Heaters 11a, 11b and a thermocouple 12 are built in the block and the temperature thereof is raised through heating. The temperature of the heater block 10 is measured by connecting a thermocouple 12 with a temperature controller and conduction of the heaters 11a, 11b is controlled. A heater block support 30 is provided, on the inner side face facing the heater block, with a heat insulation wall. A metal on the heater block side is displaced in X direction through thermal expansion but the effect thereof can be removed through deformation of the resilient structures. |
