| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the size of a substrate transportation mechanism by improving various substrate stages used for an exposure device, etc. SOLUTION: Related to a sensitized substrate stage 1 of an exposure device A, a new substrate transportation arm 7 is attached to a substrate holder 6. The substrate transportation arm 7 is reciprcically moved in vertical direction Z by a substrate movement/exchange driving device 8 when overlapped with the substrate holder 6 for delivery of a sensitized substrate W to the substrate holder 6, while reciprocally moved in back and forth direction X relative to the substrate holder 6 by a substrate transportation driving device 9 for protruding above the substrate holder 6. While the substrate transportation arm 7 is overlapped with the substrate holder 6 inside it, a installation space of the substrate transportation arm 7 is not required outside the substrate holder 6, while a space s between them is smaller when a sensitized substrate movement/exchange part 4 approaches the sensitized substrate stage 1.</p> |
