| 摘要 |
PROBLEM TO BE SOLVED: To automatically start/stop various devices such as a conveyer for controlled objects mainly constituting a semiconductor producing equipment. SOLUTION: As control system setting, the level of required device or disconnectable device is set for every device and when activating a system (11), a connection is confirmed corresponding to the level for every device (12 and 15), when the required device is not activated (13; NO), the confirmation is repeatedly performed until the device is activated (13 and 12), when the disconnectable device is not activated (16; NO), activating processing is continued without performing any confirmation, the sled of waiting a following connection request is started (17), when the disconnectable device, which is not activated at the time of initialization, is activated during system operation, the connection request from that activated device is issued to the system under operating, the system, which receives the connection request, returns the reception of connection request of the device to that device, and processing to use the device activated later can be executed as well.
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