发明名称 |
Ion beam intensity determination, comprises detecting the beam using a photo-multiplier and measuring its anode current |
摘要 |
A process for determining the intensity of an ion beam comprises detecting the beam with a photo-multiplier and measuring the anode current of the photo-multiplier. The absolute ion beam intensity is then determined by drawing a correlation between the ion beam intensity and the photo-multiplier anode current.
|
申请公布号 |
DE10020582(A1) |
申请公布日期 |
2001.11.08 |
申请号 |
DE20001020582 |
申请日期 |
2000.04.28 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
LABUS, HERWIG |
分类号 |
G01T1/16;G01T1/208;(IPC1-7):G01T1/20;G01T1/17 |
主分类号 |
G01T1/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|