发明名称 Exposure apparatus
摘要 An exposure apparatus includes a glass moving in a predetermined direction on a stage, a roll-film mask positioned above the glass and having a transfer pattern therein, and an exposure system for radiating ultraviolet light on an upper surface of the film mask so that the transfer patter formed in the film mask is transferred on the glass.
申请公布号 US2005170293(A1) 申请公布日期 2005.08.04
申请号 US20050041213 申请日期 2005.01.25
申请人 KIM SANG J. 发明人 KIM SANG J.
分类号 G03F7/20;G03B27/42;G03C5/00;G03F9/00;H01L21/027;(IPC1-7):G03F9/00 主分类号 G03F7/20
代理机构 代理人
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