发明名称 Method with mechanically strained silicon for enhancing speed of integrated circuits or devices
摘要 A method with a mechanically strained silicon for enhancing the speeds of integrated circuits or devices is disclosed. The method with a mechanically strained silicon for enhancing the speeds of integrated circuits or devices includes the following steps: (a) providing a substrate, (b) fixing the substrate, (c) applying a stress upon the substrate, and (d) inducing a strain in one of a device and a circuit by stressing the substrate.
申请公布号 US7307004(B2) 申请公布日期 2007.12.11
申请号 US20040982375 申请日期 2004.11.05
申请人 NATIONAL TAIWAN UNIVERSITY 发明人 YU CHENG-YA;JAN SUN-RONG;CHANG SHU-TONG;LIU CHEE-WEE
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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