CHEMICALLY AMPLIFIED RESIST COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a chemically amplified resist composition giving good line edge roughness while retaining high resolution.

SOLUTION: The chemically amplified resist composition comprises: a resin which comprises a structural unit having an acid-labile group in a side chain and a structural unit having a lactone structure represented by a specific structure in a side chain, and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid; and at least two acid generators represented by a specific structure.

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