| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate coater capable of easily and quantitatively monitoring whether a chemical liquid is normally discharged by nozzles or not without stopping movement of the nozzles. SOLUTION: The substrate coater 1 includes a laser sensor 71 having a projector 71a and a photoreceiver 71b to detect that a liquid pole of an organic EL liquid passes a detection position P from the alteration of light receiving quantity in the photoreceiver 71b. Therefore, whether the organic EL liquid is normally discharged or not by respective nozzles 31, 32, and 33 can easily and quantitatively be monitored without stopping the movement of a nozzle part 30. Further, the substrate coater 1 can digitalize the discharge state of the organic EL liquid from the nozzle part 30 and confirm the state by counting the number of the detection of the liquid pole. COPYRIGHT: (C)2009,JPO&INPIT |
