Micromachined gyroscope including a guided mass system

摘要

A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

主权项

1. A gyroscope comprising;
a substrate; a guided mass system, the guided mass system comprising at least one proof-mass and at least one guiding arm; wherein the proof-mass and the guiding arm are disposed in a plane parallel to the substrate; the at least one proof-mass being coupled to the at least one guiding arm; the at least one guiding arm being coupled to the substrate through a coupling comprising at least one flexible member; wherein the proof-mass vibrates in a first direction in the plane and the guiding arm rotates in the plane; wherein in response to angular velocity about a first input axis, an end of the guiding arm is able to rotate out of the plane and the proof-mass is able to rotate out of the plane; an actuator for rotating the guiding arm in the plane; and a transducer for generating an output in response to the angular velocity of the at least one proof-mass.