发明名称 Atomic referenced optical accelerometer
摘要 In some examples, a micro-electro-mechanical system (MEMS) optical accelerometer includes a housing comprising an internal chamber that includes a Fabry-Perot cavity and a proof mass affixed to the housing via one or more elastic elements, a light source configured to emit radiation, a first detector configured to receive radiation transmitted through the Fabry-Perot cavity and configured to generate one or more signals that indicate a position of the proof mass. The MEMS optical accelerometer further comprises an atomic wavelength reference and a second detector configured to detect radiation transmitted through the atomic wavelength reference and configured to generate one or more signals that indicate a wavelength of the radiation emitted by the light source, and a servomechanism electrically coupled to the second photo detector and the light source, configured to adjust the light source to maintain the radiation emitted by the light source at approximately a selected wavelength.
申请公布号 US9417261(B2) 申请公布日期 2016.08.16
申请号 US201414162697 申请日期 2014.01.23
申请人 Honeywell International Inc. 发明人 Salit Kenneth;Salit Mary;Compton Robert;Ridley Jeff A.;Nelson Karl
分类号 G01P15/093;B81B7/02;G01P15/12;G01P1/00;G01P15/13 主分类号 G01P15/093
代理机构 Shumaker & Sieffert, P.A. 代理人 Shumaker & Sieffert, P.A.
主权项 1. A micro-electro-mechanical system (MEMS) optical accelerometer, comprising: a housing comprising an internal chamber that includes: a Fabry-Perot cavity, wherein the Fabry-Perot cavity includes a proof mass affixed to the housing via one or more elastic elements; anda temperature cavity; a light source configured to emit electromagnetic radiation into the Fabry-Perot cavity; a first detector configured to receive electromagnetic radiation transmitted through or reflected from the Fabry-Perot cavity from the light source and configured to generate one or more signals that indicate a position of the proof mass; an atomic wavelength reference in optical communication with the light source; a second detector configured to detect electromagnetic radiation transmitted through the atomic wavelength reference and configured to generate one or more signals that indicate a wavelength of the electromagnetic radiation emitted by the light source; a first servomechanism electrically coupled to the second detector and the light source, wherein the servomechanism is configured to adjust the light source to maintain the electromagnetic radiation emitted by the light source at approximately a selected wavelength; a third detector configured to detect electromagnetic radiation transmitted through the temperature cavity from the light source and configured to generate one or more signals that indicate a temperature of the internal chamber; one or more heating elements in thermal contact with the housing; and a second servomechanism configured to receive the one or more signals that indicate the temperature of the internal chamber and configured to control the one or more heating elements to control the temperature of the internal chamber.
地址 Morris Plains NJ US