STRAIN SENSING ELEMENT AND PRESSURE SENSOR

摘要

According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.

主权项

1. A strain sensing element, comprising:
a film unit, the film unit being deformable; a first magnetic unit provided on the film unit and arranged with the film unit in a first direction, the first magnetic unit including a first magnetic body layer and a first intermediate magnetic layer, the first intermediate magnetic layer being provided between the first magnetic body layer and the film unit; a second magnetic unit provided on the film unit and arranged with the first magnetic unit in a second direction, the second magnetic unit including a second magnetic body layer and a second intermediate magnetic layer, the second intermediate magnetic layer being provided between the second magnetic body layer and the film unit, the second direction crossing the first direction; and a first strain sensor provided on the film unit between the first magnetic unit and the second magnetic unit, an electrical characteristic of the first strain sensor changing according to a deformation of the film unit.