Displacement sensor, spectral characteristic measuring apparatus, color measuring apparatus, planar measured object quality monitoring apparatus, displacement measuring method, spectral characteristic measuring method, and color measuring method

摘要

A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.

主权项

1. A spectral characteristic measuring apparatus comprising:
a first light source unit configured to apply first light for spectral characteristic measurement to a measurement region of a planar measured object; a second light source unit configured to apply second light for displacement measurement from a reference point of the planar measured object, in a direction oblique to a surface including the measurement region, the second light having a wavelength range that does not overlap with a wavelength range of the first light; a spectroscope configured to measure a first spectral distribution of first light applied from the first light source unit and then reflected by the measurement region and a second spectral distribution of second light applied from the second light source unit and then reflected by the measurement region; a feature amount extractor configured to extract a feature amount of the second spectral distribution of the second light related to the second light source unit; a spectral characteristic calculator configured to calculate spectral characteristics based on the first spectral distribution of the first light related to the first light source unit; and a spectral characteristic corrector configured to correct the spectral characteristics based on the extracted feature amount and a relation between spectral characteristics and a feature amount acquired previously, wherein the second light source unit includes a light source configured to emit light with a wavelength of a predetermined range, and an optical element in which a transmission wavelength or a reflection wavelength changes according to an incidence angle or an incidence position, wherein the second light is light whose wavelength changes according to an emission direction, which is generated by applying the light from the light source to the optical element obliquely at an angle where an optical axis of the light source is constant, wherein a wavelength distribution is generated on the surface including the measurement region by the second light so that the light reflected from the measurement region is changed according to the displacement of the planar measured object, and wherein the feature amount is a peak wavelength or a peak frequency of the second spectral distribution.