| 摘要 |
PURPOSE:To increase the response speed of a humidity sensor, by contacting the surface of a humidity-sensitive resistor and the roughened surface of surface roughened glass in opposed relationship. CONSTITUTION:A substrate 10 comprising alumina ceramics, the comb shaped counter electrode 11 deposited and formed onto the substrate and a humidity- sensitive resistor 12 based on barium titanate covering the counter electrode 11 are provided and the roughened surface 13a of surface roughened glass 13 is contacted with the surface of said humidity-sensitive resistor 12 in opposed relationship to constitute a humidity sensor. The humidity sensor having this structure can be improved in response because an atmosphere is penetrated between the roughened surface 13a and the surface of the humidity-sensitive resistor 12 and the humidity-sensitive resistor 12 absorbs moisture condensed between both surfaces. |
