| 摘要 |
PURPOSE:To make it possible to accurately and rapidly perform analytical operation, by performing the fluorescent X-ray analysis and diffraction X-ray analysis of the same minute part on the surface of a specimen by using the same apparatus. CONSTITUTION:A spectroscopic crystal 8 is provided so as to be opposed to the minute part P to be analyzed on the surface of a specimen 4 while a circular arc shaped incident position response type X-ray detector 10 is arranged around the point (q) symmetric to the above-mentioned minute part 9 so as to be opposed to the surface of said crystal 8 to perform fluorescent X-ray analysis. Next, the spectroscopic crystal 8 is removed and the X-ray detector 10 is slightly moved on a slide table 11 so that the center thereof is coincided with the aforementioned minute part P on the surface of the specimen to perform diffraction measurement. By this method, X-ray fluorescent analysis and diffraction measurement can be performed by using the same apparatus and the above-mentioned both measurements can be performed accurately with respect to the same minute part. |
