| 摘要 |
PURPOSE:To form a thin film of solid electrolyte having superior ionic conductivity on a substrate, by subjecting a mixture consisting of at least one kind among RbCl, RbI, KCl, and KI, CuCl, and CuI to heating and evaporation as an evaporation source on a pure-copper plate. CONSTITUTION:Pellets composed of a mixture of at least one kind among RbCl, RbI, KCl, and KI, CuCl, and CuI are placed in an ark-like boat made of high-purity copper in a vacuum tank, and the pure-copper boat is electrified and heated. Then the pellets in the boat are melted and evaporated, so that an Rb(K)Cl-CuCl-CuI-type C<+>-ion conductive film is vapor-deposited on a glass substrate disposed in a position opposite to the boat, which is subjected to heat treatment in an Ar air flow at 130 deg.C for 3hr so as to be formed into the thin film of solid electrolyte excellent in ionic conductivity. |
