ARRANGEMENT FOR THE DETECTION OF SECONDARY AND/OR BACK-SCATTERING ELECTRONS IN AN ELECTRON BEAM APPARATUS,申请号EP19860110819-传众专利搜索

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发明名称	ARRANGEMENT FOR THE DETECTION OF SECONDARY AND/OR BACK-SCATTERING ELECTRONS IN AN ELECTRON BEAM APPARATUS
摘要
申请公布号	EP0218829(B1)	申请公布日期	1991.11.06
申请号	EP19860110819	申请日期	1986.08.05
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	LISCHKE, BURKHARD, PROF. DR.;ROSE, HARALD, PROF. DR.;ZACH, JOACHIM, DIPL.-PHYS.
分类号	G01T1/28;H01J37/153;H01J37/244;G01N23/203	主分类号	G01T1/28
代理机构		代理人
主权项
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