ORGANIC MATTER ELIMINATION DEVICE

摘要

PURPOSE:To enable maintenance and an operator's safety to be improved when performing inspection and replacement of an ozone degrader by allowing the ozone degrader which is built into a device and degrades ozone remaining within a discharge gas to be removed from the device by a rotary slide movement. CONSTITUTION:Ozone degraders 3a and 3b are mounted to a bracket which can be slid horizontally so that they can be attached and removed at one touch. They can be removed from a device easily by a bracket with rotary mechanism or a bracket with slide mechanism. A wafer 8 which is filled into a wafer carrier 6a is carried to a reaction treatment room 2a or 2b. The treatment rooms 2a and 2b supply gas containing ozone for performing oxidative destruction treatment of an organic matter. A wafer 8 is taken out of the treatment rooms 2a and 2b and are stored in the wafer carrier 6b. A reaction gas after performing oxidative destruction treatment of the organic matter the reaction treatment rooms 2a and 2b degrades the remaining ozone trough the ozone degraders 3a and 3b and then is discharged from a discharge duct to the outside of the device.