发明名称 Position measuring device
摘要 A position measuring device for detecting the relative position of a scanning unit and a scale. The position measuring device includes a scale and a scanning unit that is displaced with respect to the scale in a measuring direction. The scanning unit includes a scanning grating, a ridge prism and an optoelectronic detector element. The ridge prism having a ridge that is oriented parallel with the measuring direction, the ridge prism acts as a retro-reflector in a second direction which is aligned in a plane of the scale vertically with respect to the measuring direction.
申请公布号 US7019842(B2) 申请公布日期 2006.03.28
申请号 US20030380847 申请日期 2003.09.24
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 HOLZAPFEL WOLFGANG;SCHREIBER ANDREAS
分类号 G01B9/02;G01B11/14;G01D5/347;G01D5/36;G01D5/38;G03F7/20 主分类号 G01B9/02
代理机构 代理人
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