发明名称 |
Position measuring device |
摘要 |
A position measuring device for detecting the relative position of a scanning unit and a scale. The position measuring device includes a scale and a scanning unit that is displaced with respect to the scale in a measuring direction. The scanning unit includes a scanning grating, a ridge prism and an optoelectronic detector element. The ridge prism having a ridge that is oriented parallel with the measuring direction, the ridge prism acts as a retro-reflector in a second direction which is aligned in a plane of the scale vertically with respect to the measuring direction.
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申请公布号 |
US7019842(B2) |
申请公布日期 |
2006.03.28 |
申请号 |
US20030380847 |
申请日期 |
2003.09.24 |
申请人 |
DR. JOHANNES HEIDENHAIN GMBH |
发明人 |
HOLZAPFEL WOLFGANG;SCHREIBER ANDREAS |
分类号 |
G01B9/02;G01B11/14;G01D5/347;G01D5/36;G01D5/38;G03F7/20 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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