| 摘要 |
PURPOSE:To improve electric characteristics like withstand voltage characteristics, and reduce manufacturing cost and work amount, by laminating dielectric composed of polymer films and inner electrodes. CONSTITUTION:Evaporation operation for forming an inner electrode and evaporation polymerization operation for forming a polymer film are alternately repeated, thereby forming multilayered structure 4 constituted of inner electrodes 2a, 2b, 2c and polymer films 3a, 3b, 3c of fluoroalkylated aromatic polyamic acid. A substrate 1 having the multilayered structure 4 is sent to a heating- dehydration process, in which heating operation for the polymer films 3a, 3b, 3c of fluoroalkylated aromatic polyamic acid of the multilayered structure 4 is performed. By heating, the polymer films 3a, 3b, 3c of fluoroalkylated aromatic polyamic acid are turned into polymer films of fluoroalkylated aromatic polyimide. |
