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发明名称
SUBSTRATE HEATING METHOD WITH INFRARED RAYS AND SUBSTRATE HEATING APPARATUS
摘要
申请公布号
JPH07130677(A)
申请公布日期
1995.05.19
申请号
JP19930279133
申请日期
1993.11.09
申请人
FUJITSU LTD
发明人
SHIINA KAZUNARI
分类号
C23C14/24;C23C14/50;H01L21/26;H01L21/324;(IPC1-7):H01L21/26
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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