发明名称 CAPILLARY FOR WIRE BONDING DEVICE AND METHOD FOR FORMING ELECTRIC CONNECTION BUMP USING THE SAME
摘要 PURPOSE:To provide a wire bonding device which connects a semiconductor device with a circuit substrate, with ease and reliability, and a method for forming a bump, while the bump of desired height and shape is obtained with no extra levelling process, accompanied by shorter bump-formation time and less casts, relating to the process for forming a bump of a semiconductor device. CONSTITUTION:Relating to a capillary 1 for ball-bonding for forming a bump 7 on an electrode pad 13 of a semiconductor device 6, a pressurizing member that pressurizes a ball-like tip of a metal wire 4 to an electrode pad 13 so that the tip is press-fixed to the pad 13, a draw-out hole 2 that, provided at the pressurizing member, supplies with the metal wire 4, and a levelling member 31 far uniforming the heights of bumps 7 formed on the electrode pad 13, are provided.
申请公布号 JPH0799202(A) 申请公布日期 1995.04.11
申请号 JP19940091002 申请日期 1994.04.28
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TOMURA YOSHIHIRO;BESSHO YOSHIHIRO
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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