MEMBER FOR PRODUCTION OF SEMICONDUCTOR CRYSTAL AND PRODUCTION THEREOF

摘要

PURPOSE:To obtain a member for production of a semiconductor crystal not releasing carbon powder from the surface. CONSTITUTION:Polycarbodiimide resin or a polycarbodiimide resin-based compsn. is molded into the shape of a member for production of a semiconductor crystal and the resultant molded body is carbonized to produce the objective member for production of a semiconductor crystal made of glassy carbon derived from the polycarbodiimide resin.