| 摘要 |
<p>PURPOSE:To provide a thermal type microflow sensor and a manufacturing method therefor which requires such a small power consumption as to allow driving with a battery, is excellent in response and easy to be mass-produced, and has a wide measuring range from a low to high flow velocity. CONSTITUTION:The thermal type microflow sensor includes a heater wire 4 which is formed by a semiconductor microprocessing technology in a heat insulation-structured form on a semiconductor substrate 1 using a material with a resistance rate in a range of 3.1X10<-7> to 2X10<-2>OMEGAm to ensure that resistance value is almost 1kOMEGA. An example of the material for the heater wire 4 is polysilicon.</p> |
