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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10144726(A)
申请公布日期
1998.05.29
申请号
JP19960300588
申请日期
1996.11.12
申请人
TOSHIBA CHEM CORP
发明人
MATSUDA OSAMU
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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