| 摘要 |
The sputtering station for disk-shaped workpieces includes an airlock chamber (3), a sputter source (7) with a working surface (7a), a transport chamber (1) with openings respectively into the airlock chamber and to the sputter source for transfer of a workpiece (23), and a transport unit (13). The airlock chamber (3) and the working surface (7a) of the sputter source lie on the same lateral axis (Q) and face one another on opposite sides of the transport chamber. The transport unit (13) is pivotably driven about an axis (A1) which is oriented perpendicular to the axis (Q) and jointly with the latter defines a vertical plane (E). The unit (13) is provided with at least one radially extendable/retractable carrier arm (19) with a workpiece seating (21). Also claimed is a sputtering installation incorporating such a sputtering station. |
