| 摘要 |
PROBLEM TO BE SOLVED: To reduce manufacturing period and improve yield by forming a plurality of pairs of display electrodes by coating a plate main surface with display electrode material and partially machining it with laser. SOLUTION: Materials of transparent electrode portions 221, 231 and SnO2-Sb2 O3 based transparent conductive film material are transformed to gas form and are made to flow to the surface of a front panel glass 21 heated to about 550 deg.C to form a transparent conductive film 50. A region 210 for forming a leading electrode portion is secured at both ends of the glass 21 in the x direction, and the transparent conductive film 50 is patterned to form the transparent electrode portions 221,231. In other words, a second laser beam is folded and irradiated to the transparent conductive film 50 to evaporate the transparent conductive film 50 to form a transparent conductive residual portion 211. Then, the first and second laser beams are irradiated in the y direction, a clearance between a pair of display electrodes and clearances between two pairs of display electrodes are formed in parallel on the glass 21 to form the transparent electrode portions 221, 231. Thus, a laser machining process comprises only laser machining and cleaning and drying of a machined object, and therefore working period is reduced.
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