| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical CCD in a photo diode all pixel general reading system wherein the questions that the photo resist exposure margin is small, wirings break at stepped parts, etc., are solved by realizing a three-phase driven charge coupled device with a two layer electrode structure. SOLUTION: In a charge coupled device having a first layer of polysilicon electrodes 2 formed through an insulation film on a semiconductor and a second layer of polysilicon electrodes 4 electrically insulated from the first layer of electrodes 2 and formed through an insulation film on the semiconductor, a charge transfer part is formed by pairing two polysilicon electrodes 2a, 2b in the first layer with one polysilicon electrode 4 in the second layer.
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