发明名称 WIRELESS RADIO FREQUENCY TESTING METHODE OF INTEGRATED CIRCUITS AND WAFERS
摘要 The present invention is for an apparatus and method for the wireless testing of Integrated Circuits and wafers. The apparatus comprises a test unit external from the wafer and at least one test circuit which is fabricated on the wafer which contains the Integrated Circuit. The test unit transmits an RF signal to power the test circuit. The test circuit, comprising a variable ring oscillator, performs a series of parametric tests at the normal operating frequency of the Integrated Circuit and transmits the test results to the test unit for analysis.
申请公布号 WO0188976(A3) 申请公布日期 2002.07.18
申请号 WO2001CA00688 申请日期 2001.05.15
申请人 THE GOVERNORS OF THE UNIVERSITY OF ALBERTA 发明人 MOORE, BRIAN
分类号 H01L21/66;H01L21/822;H01L27/04 主分类号 H01L21/66
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