| 摘要 |
PROBLEM TO BE SOLVED: To provide a gate valve for vacuum which can supply air to an inflated seal with a simple constitution and which has few possibility of generating particles from the inflated seal. SOLUTION: The gate valve for the vacuum includes the long tube-like inflated seal which can expand by supplying air into its interior and which is mounted along the periphery of an opening 4a on an inner surface of a valve box body 2, and an air supply passage 7 provided in the valve body 2 to supply the air to the interior of the inflated seal 5. The inflated seal 5 is expanded in the direction of a valve plate 3 to be pushed against the valve plate 3 by the air from the air supply passage 7, and the opening 4a is closed thereby. COPYRIGHT: (C)2005,JPO&NCIPI
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