SLIT NOZZLE CLEANING APPARATUS

摘要

[PROBLEMS] To provide a slit nozzle cleaning apparatus by which a time required from cleaning to drying of a slit nozzle can be shortened. [MEANS FOR SOLVING PROBLEMS] A slit nozzle cleaning apparatus (10) is movable along the longitudinal direction of a slit nozzle (6). The slit nozzle cleaning apparatus is provided in sequence with a cleaning liquid supplying section (17) having a cleaning liquid jetting port (19) for jetting a cleaning solution to the slit nozzle (6), a wiping member (16) for wiping off the cleaning solution adhered on the slit nozzle (6), and a drying section (18) having air jetting ports (23, 23).