| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a display device having a thin film transistor and a storage capacitor storing a display signal applied to a pixel electrode through this thin film transistor on a substrate, wherein dielectric strength between electrodes forming the storage capacitor is enhanced for increasing the yield. <P>SOLUTION: In the storage capacitor 1C, a lower storage capacitor electrode 12, a thin lower storage capacitor film 14, a polysilicon layer 15C, an upper storage capacitor film 16C and an upper storage capacitor electrode 18 are laminated. The polysilicon layer 15C is formed by crystallization by laser annealing. The polysilicon layer 15C of the storage capacitor 1C is microcrystalline and thus the flatness of its surface is enhanced. The pattern of the polysilicon layer 15C (storage capacitor electrode) is formed larger than the bottom portion of an opening OP, and the edge of its peripheral portion is located on a buffer film 13 on the slant portion K of the opening OP or on the buffer film 13 on the outside of the opening OP. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
