VERFAHREN ZUR HERSTELLUNG VON PAAREN PARALLELER FINFETS,申请号DE20046015793T-传众专利搜索

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发明名称	VERFAHREN ZUR HERSTELLUNG VON PAAREN PARALLELER FINFETS
摘要
申请公布号	DE602004015793(D1)	申请公布日期	2008.09.25
申请号	DE20046015793T	申请日期	2004.06.30
申请人	INTERNATIONAL BUSINESS MACHINES CORP.	发明人	BRYANT, ANDRES;CLARK, WILLIAM F.;FRIED, DAVID M.;JAFFE, MARK D.;NOWAK, EDWARD J.;PEKARIK, JOHN J.;PUTNAM, CHRISTOPHER S.
分类号	H01L29/06;H01L21/00;H01L21/308;H01L21/336;H01L21/8238;H01L21/84;H01L27/12;H01L29/76;H01L29/786	主分类号	H01L29/06
代理机构		代理人
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