Scale, vernier encoder and apparatus using the same

摘要

The scale for a vernier encoder including a sensor relatively movable with the scale in a first direction and configured to read periodic patterns provided in the scale. The scale includes first and second scale tracks each including multiple periodic patterns having mutually different periods in the first direction and being arranged parallel in a second direction. The multiple periodic patterns form, between the first and second scale tracks, multiple pairs of periodic patterns to be used for producing multiple periodic signals, each periodic signal being produced by vernier operation. In at least one of the first and second scale tracks, a first periodic pattern, which is used for producing a shortest period periodic signal among the multiple periodic signals, is provided closest to a boundary between the first and second scale tracks among the multiple periodic patterns.

主权项

1. A scale for a vernier encoder including a sensor relatively movable with the scale in a first direction and configured to read periodic patterns provided in the scale, the scale comprising:
a first scale track and a second scale track each including multiple periodic patterns (a) having mutually different periods in the first direction and (b) being arranged parallel in a second direction orthogonal to the first direction, wherein the first and second scale tracks provide a plurality of paired periodic patterns, each pair including one period pattern from the first scale track and one periodic pattern from the second scale track, including:
first paired periodic patterns having mutually different periods for producing a first periodic signal by a vernier operation performed on output from the sensor that reads the first paired periodic patterns, the first periodic signal having a shortest period among multiple periodic signals produced from the output from the sensor that reads the plurality of paired periodic patterns; andsecond paired periodic patterns having mutually different periods for producing a second periodic signal by the vernier operation performed on output from the sensor that reads the second paired periodic patterns, the second periodic signal having a longer period than that of the first periodic signal among the multiple periodic signals, the first and second periodic signals being used in combination with each other to provide position information, and wherein, among the plurality of paired periodic patterns, the first paired periodic patterns are provided closest to a boundary between the first and second scale tracks, and the second paired periodic patterns are provided farther from the boundary than the first paired periodic patterns.