Signal path switch and probe card having the signal path switch

摘要

A probe card, which is between a tester and a device under test (DUT), includes two first electrical lines, two second electrical lines, two inductive elements, and a capacitor. The first electrical lines are electrically connected to the probes respectively. The second electrical lines are electrically connected to the first electrical lines respectively. The inductive elements are electrically connected to the first electrical lines and the tester respectively; and the capacitor has opposite ends connected to the second electrical lines respectively.

主权项

1. A signal path switch, which is provided between a tester and two probes, comprising:
two first electrical lines electrically connected to the probes respectively; two second electrical lines electrically connected to the first electrical lines respectively; two inductive elements, each of which is electrically connected to each of the first electrical lines and the tester respectively; and a capacitor having opposite ends electrically connected to the second electrical lines respectively; wherein a high-frequency test signal is transmitted through one of the probes, one of the first electrical lines, one of the second electrical lines, the capacitor, the other second electrical line, the other first electrical line, and then back to the other probe.