| 摘要 |
<p>PURPOSE: To provide a substrate transfer device having a thin hand and capable of holding substrates even if they are warped. CONSTITUTION: The lower closed empty spaces 237 of suction/holding mechanisms 39A, 39A, 39B, and 39B are controlled in pressure by the switch of solenoid valves 83C and 83D connected to a pressurizing device 8, whereby a pad 239 fixed to a diaphragm 139 is raised to support a substrate W, so that the substrate can be transferred well even if they are warped. Moreover, as the pad 239 is controlled in vertical movement only by controlling the closed empty space 237 in pressure, a thin hand can be used. Furthermore, the substrate W is sucked and supported by a pad 239 by the control of the solenoid valves 83A and 83B connected to a vacuum suction device 81, so that the substrate W is securely held.</p> |
