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发明名称
A LOW FREQUENCY INDUCTIVE RF PLASMA REACTOR
摘要
申请公布号
EP0507885(B1)
申请公布日期
1997.12.03
申请号
EP19910904021
申请日期
1991.01.02
申请人
MATTSON TECHNOLOGY INC.
发明人
SAVAS, STEPHEN, E.
分类号
C23F4/00;H01J37/32;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/24
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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